Determines the chemical composition (spatial-resolved): ppm sensitivity
TOF-SIMS combines static and dynamic SIMS in one machine.
Spatial-resolved Mass Spectrometry: lateral resolution < 100nm, depth
Secondary electron microscopy (SEM): <100nm.
Parallel mass detection up to high masses.
Mass resolution > 10,000
Cold sample transfer for volatile materials
Sample cooling to 150K and heating to 900K.
Charge Neutralization: ideal for insulators.
In combination with a preparation chamber (housing LEED, Knudsen evaporators,
AES, IRAS, Quadrupole-Masspectrometer, micro balance, facilities to clean
a surface) the TOF-SIMS apparatus is very flexible and versatile.
Some possible applications: Defect chemistry, Transport of oxygen in ionic
materials, Reactions at interfaces, Composition of Quantum dots and their
interfaces, Multilayer Structures (how sharp are the interfaces?), Proton
Conductors, Nano Electronics, Nano Fibers, Cluster, Oxides, Nitrides, Hydrides,
HTc superconductors, Composition of molecular monolayers.
The company, where we ordered the TOF-SIMS machine: ION-TOF GmbH